JPH0425705Y2 - - Google Patents

Info

Publication number
JPH0425705Y2
JPH0425705Y2 JP1988170209U JP17020988U JPH0425705Y2 JP H0425705 Y2 JPH0425705 Y2 JP H0425705Y2 JP 1988170209 U JP1988170209 U JP 1988170209U JP 17020988 U JP17020988 U JP 17020988U JP H0425705 Y2 JPH0425705 Y2 JP H0425705Y2
Authority
JP
Japan
Prior art keywords
cup
developed
spindle chuck
cleaning
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1988170209U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0290845U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988170209U priority Critical patent/JPH0425705Y2/ja
Publication of JPH0290845U publication Critical patent/JPH0290845U/ja
Application granted granted Critical
Publication of JPH0425705Y2 publication Critical patent/JPH0425705Y2/ja
Expired legal-status Critical Current

Links

JP1988170209U 1988-12-30 1988-12-30 Expired JPH0425705Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988170209U JPH0425705Y2 (en]) 1988-12-30 1988-12-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988170209U JPH0425705Y2 (en]) 1988-12-30 1988-12-30

Publications (2)

Publication Number Publication Date
JPH0290845U JPH0290845U (en]) 1990-07-18
JPH0425705Y2 true JPH0425705Y2 (en]) 1992-06-19

Family

ID=31460956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988170209U Expired JPH0425705Y2 (en]) 1988-12-30 1988-12-30

Country Status (1)

Country Link
JP (1) JPH0425705Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639130U (en]) * 1986-07-02 1988-01-21

Also Published As

Publication number Publication date
JPH0290845U (en]) 1990-07-18

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